Title :
Silicon knife-edge taper fiber coupler using CMOS backend compatible process
Author :
Maegami, Yuriko ; Takei, Ryohei ; Omoda, E. ; Sasaki, Motoharu ; Ukita, Shigenari ; Amano, Tetsuo ; Okano, Makoto ; Mori, Marco ; Kamei, Toshihiro ; Sakakibara, Y.
Author_Institution :
Nat. Inst. of Adv. Ind. Sci. & Technol., Tsukuba, Japan
Abstract :
We demonstrate highly efficient fiber couplers with a silicon knife-edge taper waveguide fabricated by CMOS backend compatible process. The insertion losses of fiber couplers are 1.9 and 1.7 dB/facet for the TE- and TM-like modes.
Keywords :
elemental semiconductors; integrated optoelectronics; optical fibre couplers; optical fibre fabrication; optical fibre losses; silicon; CMOS backend compatible process; Si; TE-like modes; TM-like modes; insertion losses; silicon knife-edge taper fiber couplers; silicon knife-edge taper waveguide; Couplers; Optical fiber couplers; Optical fiber devices; Optical fiber polarization; Silicon;
Conference_Titel :
Group IV Photonics (GFP), 2014 IEEE 11th International Conference on
Conference_Location :
Paris
Print_ISBN :
978-1-4799-2282-6
DOI :
10.1109/Group4.2014.6961988
