The characteristics of the starting potential of barrier discharge

Authors intended to clarify the most suitable condition of the reactor by using barrier discharge as plasma process for removing TO/sub x/ gas. The starting potential of barrier discharge was measured with changing electrode gap, thickness of dielectric substrate. And we investigated the condition of impedance matching for the reactor circuit. As results, the power consumed by barrier discharge increased as a function of the electrode gap, load resistance and discharge current. The rate of NO decomposition depended on the thickness of dielectric substrate. This corresponded to the tendency of the power consumed by barrier discharge.