High precision Si waveguide devices designed for 1.31μm and 1.55μm wavelengths on 300mm-SOI

Author

Shimura, Daisuke ; Horikawa, Tsuyoshi ; Okayama, Hideaki ; Seok-Hwan Jeong ; Tokushima, Masatoshi ; Sasaki, Hiromu ; Mogami, Tohru

Author_Institution

Photonics Electron. Technol. Res. Assoc. (PETRA), Tsukuba, Japan

fYear

2014

fDate

27-29 Aug. 2014

Firstpage

31

Lastpage

32

Abstract

World-record low propagation losses for single-mode silicon waveguides with TE-polarization were demonstrated. As the results of precise width control, the deviation of 1.8nm was confirmed for the resonance peaks of a ring-resonator on a 300mm-SOI.

Keywords

elemental semiconductors; integrated optics; light polarisation; optical losses; optical resonators; optical waveguides; silicon; silicon-on-insulator; SOI; Si; TE-polarization; high precision Si waveguide devices; low propagation losses; precise width control; resonance peaks; ring resonator; silicon-on-insulator; single-mode silicon waveguides; size 300 mm; wavelength 1.31 mum; wavelength 1.55 mum; Lithography; Optical device fabrication; Optical filters; Optical waveguides; Propagation losses; Silicon; 300mm-SOI; propagation loss; silicon waveguide; wavelength filters;

fLanguage

English

Publisher

ieee

Conference_Titel

Group IV Photonics (GFP), 2014 IEEE 11th International Conference on

Conference_Location

Paris

Print_ISBN

978-1-4799-2282-6

Type

conf

DOI

10.1109/Group4.2014.6962013

Filename

6962013