Title :
High precision Si waveguide devices designed for 1.31μm and 1.55μm wavelengths on 300mm-SOI
Author :
Shimura, Daisuke ; Horikawa, Tsuyoshi ; Okayama, Hideaki ; Seok-Hwan Jeong ; Tokushima, Masatoshi ; Sasaki, Hiromu ; Mogami, Tohru
Author_Institution :
Photonics Electron. Technol. Res. Assoc. (PETRA), Tsukuba, Japan
Abstract :
World-record low propagation losses for single-mode silicon waveguides with TE-polarization were demonstrated. As the results of precise width control, the deviation of 1.8nm was confirmed for the resonance peaks of a ring-resonator on a 300mm-SOI.
Keywords :
elemental semiconductors; integrated optics; light polarisation; optical losses; optical resonators; optical waveguides; silicon; silicon-on-insulator; SOI; Si; TE-polarization; high precision Si waveguide devices; low propagation losses; precise width control; resonance peaks; ring resonator; silicon-on-insulator; single-mode silicon waveguides; size 300 mm; wavelength 1.31 mum; wavelength 1.55 mum; Lithography; Optical device fabrication; Optical filters; Optical waveguides; Propagation losses; Silicon; 300mm-SOI; propagation loss; silicon waveguide; wavelength filters;
Conference_Titel :
Group IV Photonics (GFP), 2014 IEEE 11th International Conference on
Conference_Location :
Paris
Print_ISBN :
978-1-4799-2282-6
DOI :
10.1109/Group4.2014.6962013
