Title :
Non-freestanding silicon slotted photonic crystal cavities with Q of 30,000 and mode volume of 0.03(λ/n)3
Author :
Serna, S. ; Caer, C. ; Zhang, Wensheng ; Le Roux, X. ; Cassan, Eric
Author_Institution :
Inst. d´Electron. Fondamentale, Univ. Paris-Sud, Orsay, France
Abstract :
Properties of non-freestanding silicon slot photonic crystal cavities for application to sensing are investigated by probing their resonance wavelength tuning as a function of covering material index. Sensitivities of 225 nm/RIU are obtained with Q around 30,000 and cavity mode volumes ~ V=0.03(λ/n)3.
Keywords :
integrated optics; optical sensors; optical tuning; photonic crystals; silicon; cavity mode volumes; covering material index; nonfreestanding silicon slot photonic crystal cavity properties; resonance wavelength tuning; sensing; Cavity resonators; Indexes; Photonic crystals; Sensitivity; Sensors; Silicon; Tuning;
Conference_Titel :
Group IV Photonics (GFP), 2014 IEEE 11th International Conference on
Conference_Location :
Paris
Print_ISBN :
978-1-4799-2282-6
DOI :
10.1109/Group4.2014.6962015