Title :
Proposal of MEMS optical device using slot-ring resonator with low-voltage operation
Author :
Amemiya, Yoshiteru ; Sana, Amrita Kumar ; Okada, Kenichi ; Honzawa, Keita ; Fukuyama, Masataka ; Yokoyama, Shiyoshi
Author_Institution :
Res. Inst. for Nanodevice & Bio Syst., Hiroshima Univ., Higashi-Hiroshima, Japan
Abstract :
Mechanical-operation slot-ring modulators with more than 10 dB extinction ratio at 0.4 V are proposed. Slot width <; 50 nm is found to be necessary for mechanical operation rather than carrier-plasma effect.
Keywords :
micro-optomechanical devices; micromechanical resonators; optical modulation; optical resonators; MEMS optical device; carrier-plasma effect; extinction ratio; low-voltage operation; mechanical-operation slot-ring modulators; slot width; slot-ring resonator; voltage 0.4 V; Electrostatics; Extinction ratio; Modulation; Optical resonators; Optical waveguides; Refractive index;
Conference_Titel :
Group IV Photonics (GFP), 2014 IEEE 11th International Conference on
Conference_Location :
Paris
Print_ISBN :
978-1-4799-2282-6
DOI :
10.1109/Group4.2014.6962024
