Title :
Properties of nonthermal capacitively coupled plasmas generated in narrow quartz tubes for synthesis of silicon na-noparticles
Author :
Sang-Heon Song ; Le Picard, Romain ; Girshick, Steven L. ; Kortshagen, Uwe R. ; Kushner, Mark J.
Author_Institution :
Univ. of Michigan, Ann Arbor, MI, USA
Abstract :
Results from a computational investigation of the fundamental properties of plasma synthesis of silicon nanocrystals (SNCs) using the 2-dimensional hybrid plasma equipment model (HPEM) were discussed. The model reactor comprised quartz tube excited by the two ring electrodes at 25 MHz. Most of SiH4 dissociated in transitioning through the plasma zone. The dissociation products produced mostly Si2H6, SiH3, and SiH2 on the exit.
Keywords :
dissociation; elemental semiconductors; nanofabrication; nanoparticles; plasma materials processing; semiconductor growth; silicon; 2-dimensional hybrid plasma equipment model; Si; dissociation products; frequency 25 MHz; nanocrystals; nanoparticles; narrow quartz tubes; nonthermal capacitively coupled plasmas; plasma synthesis; ring electrodes; Educational institutions; Electron tubes; Optical filters; Plasma temperature; Silicon;
Conference_Titel :
Plasma Science (ICOPS), 2013 Abstracts IEEE International Conference on
Conference_Location :
San Francisco, CA
DOI :
10.1109/PLASMA.2013.6634910
