Title :
40Gbit/s silicon ring resonator-based modulator fabricated on 300mm SOI wafers
Author :
Perez-Galacho, D. ; Marris-Morini, D. ; Baudot, C. ; Fedeli, J.-M. ; Vulliet, Nathalie ; Souhaite, A. ; Olivier, S. ; Le Roux, X. ; Bouf, F. ; Vivien, L.
Author_Institution :
Inst. d´Electron. Fondamentale, Univ. Paris-Sud, Orsay, France
Abstract :
We report 40Gbit/s ring resonator based silicon modulator fabricated on 300mm SOI wafers, with a comparison between theoretical and experimental performances.
Keywords :
elemental semiconductors; integrated optics; optical fabrication; optical modulation; optical resonators; silicon; silicon-on-insulator; SOI wafers; Si; bit rate 40 Gbit/s; silicon ring resonator-based modulator; silicon-on-insulator; size 300 mm; High-speed optical techniques; Modulation; Optical device fabrication; Optical ring resonators; Phase shifters; Silicon; Wavelength measurement;
Conference_Titel :
Group IV Photonics (GFP), 2014 IEEE 11th International Conference on
Conference_Location :
Paris
Print_ISBN :
978-1-4799-2282-6
DOI :
10.1109/Group4.2014.6962044
