Design and characterization of a linear motion piezoelectric microactuator

The design and characterization of a fast linear microactuator is described. The microactuator is constructed of number of piezoelectric plates that are placed on both sides of a sliding mass. Actuation of the plates in an accordionlike fashion provides a linear displacement of ±0.36 mm. In addition, it has force capability of over 80 g, and is provided with both position and force-sensing capabilities. Characterization of the dynamic performance of the microactuator is presented, and initial tests on it show that it has a second-order system behavior with nonlinear response. The resolution of the microactuator is affected by the performance of the capacitive-type position sensor, and varies from 3 μm to less than 0.6 μm