Observation of temporal behavior in an array of microplasma jet devices with different electrode driving conditions

Summary form only given. Temporally resolved behavior of microplasma jet arrays fabricated in a moldable, and optically transparent polymer have been investigated by shaping the electrical field within the microplasma channel at atmospheric pressure. Attributed to a series of micropatterning process for a moldable plastic, array of microchannels having a diameter less than 355 μm are precisely prepared and stable plasma jet with a He flow at ~800 Torr was obtained by a ac waveform of 800 V_RMS at 20 kHz. Optical emission spectra were obtained from the He microplasma jet in air and the gas temperature of the microplasma has been calculated from the emission intensity profile of N₂⁺ first negative system in the spectrum. The temporal propagation of the microjets is significantly dependent on the electrode configuration, geometries and driving waveform. In particular, the spatiotemporal behavior of microplasma jet indicates that a controlled sequence of multiple electrode driving can modulate either plasma propagation and glow mode of the microplasma jet. The ability to modulate plasma performance in the microchannel array promises various potential applications in the future. The characteristics and control of microplasma propagation inside the microcavity with various structural and operational parameters will be discussed.