Title :
Development of Indium Phosphide MEMS for tunable optical buffering
Author :
Podoliak, Nina ; Ng, Wing H. ; Stewart, Will ; Huiyun Liu ; Kenyon, Anthony J. ; Horak, Peter
Author_Institution :
Optoelectron. Res. Centre, Univ. of Southampton, Southampton, UK
Abstract :
We are developing a MEMS-based device that can produce continuously tunable delays of optical signals. The design is based on coupled dual suspended waveguides fabricated in Indium Phosphide. We report on simulation-based optimisation of optical and mechanical properties of the structure and on current progress in fabrication.
Keywords :
indium compounds; micro-optics; micromechanical devices; optical information processing; optical tuning; optical waveguides; InP; coupled dual suspended waveguides; indium phosphide MEMS; mechanical properties; optical properties; optical signals; tunable delays; tunable optical buffering; III-V semiconductor materials; Indium phosphide; Integrated optics; Optical buffering; Optical device fabrication; Optical pulses; Optical waveguides; III–V semiconductor materials; indium phosphide; microelectromechanical systems; optical buffering; optical waveguides;
Conference_Titel :
Transparent Optical Networks (ICTON), 2015 17th International Conference on
Conference_Location :
Budapest
DOI :
10.1109/ICTON.2015.7193734
