Near-field microwave excitation and detection of NEMS resonators

This paper describes a novel method using a near-field microwave probe system which is able to simultaneously excite and readout the oscillation of a range of mechanical resonators, from hundreds of microns to sub-micron size. We report the preparation of high Q dielectric microwave resonators coupled to a sharpened tungsten near-field tip and describe the microwave homodyne detection system used to drive and detect mechanical vibrations of a nearby electromechanical resonator. High Q resonators are particularly useful for precision measurement because the system may be interrogated by sensing small shifts in resonant frequency, the most accurately measurable physical quantity. Experimental results are presented as well as some predictions of the system potential.