Title :
A low-voltage electrostatically actuated MEMS scanner for in vivo biomedical imaging
Author :
Yeow, T.W. ; Lim, K.Y. ; Wilson, B. ; Goldenberg, A.A.
Author_Institution :
Robotics & Autom. Lab., Toronto Univ., Ont., Canada
fDate :
6/24/1905 12:00:00 AM
Abstract :
With the inherent advantages of micromachining technologies such as small size, small mass, low cost, low power consumption and high reliability, there will be radical changes to biomedical devices and how clinical diagnoses are made. One of the most promising applications of microtechnologies is in the biomedical field. This paper presents a low-voltage high-torque MEMS 2D scanner well suited for in vivo biomedical imaging
Keywords :
bio-optics; biocontrol; biomedical equipment; biomedical imaging; electrostatic actuators; micro-optics; micromachining; mirrors; optical control; optical microscopes; optical scanners; sputter etching; MEMS 2D scanner; deep reactive ion etching; electrostatically actuated scanner; endoscopic coherent optical microscope; in vivo biomedical imaging; in vivo tissue imaging; low-voltage high-torque scanner; micromachining; micromechatronics; optical MEMS scanner; Biomedical imaging; Biomedical optical imaging; Electrostatics; Etching; In vivo; Micromechanical devices; Mirrors; Resists; Silicon; Voltage;
Conference_Titel :
Microtechnologies in Medicine & Biology 2nd Annual International IEEE-EMB Special Topic Conference on
Conference_Location :
Madison, WI
Print_ISBN :
0-7803-7480-0
DOI :
10.1109/MMB.2002.1002314
