Variable Forgetting Factor-Based Friction Compensation Method of Precision Stages

Author

Goka, Shigeki ; Hashimoto, Seiji ; Ohishi, Kiyoshi ; Ishikawa, Takeo ; Adachi, Shuichi ; Kosaka, Koji ; Kubota, Hiroshi ; Ohmi, Tadahiro

Author_Institution

Dept. of Electron. Eng., Gunma Univ.

fYear

2006

Firstpage

3995

Lastpage

4000

Abstract

This paper presents the nonresonant ultrasonic motor (SPIDER)-driven precision stage control based on an adaptive identification method with a variable forgetting factor (VFF). SPIDER-driven stage has a strong non-linearity due to the frictional drive mechanism. Focusing on the VFF, dynamical change of frictional property is detected. Therefore, fast and precise friction compensation can be performed based on the VFF. The validity of both the identification and compensation methods is verified through experiments

Keywords

compensation; friction; parameter estimation; piezoelectric actuators; position control; ultrasonic motors; SPIDER; VFF; actuator; adaptive parameter identification; friction compensation method; frictional drive mechanism; nonresonant ultrasonic motor; precision positioning stage control; synchronous piezoelectric device driver; variable forgetting factor; Actuators; Computer industry; Electric variables control; Electronics industry; Friction; Industrial control; Industrial electronics; Leg; Physics computing; Position measurement; adaptive identification; friction compensation; ultra-precision stage; variable forgetting factor;

fLanguage

English

Publisher

ieee

Conference_Titel

SICE-ICASE, 2006. International Joint Conference

Conference_Location

Busan

Print_ISBN

89-950038-4-7

Electronic_ISBN

89-950038-5-5

Type

conf

DOI

10.1109/SICE.2006.315007

Filename

4108206