Fabrication and crystallization of AAO template for sensor applications

Author

Jo, Seo-hyeon ; Lee, Sung-gap ; Kim, Dae-young

Author_Institution

Dept. of Ceramic Eng., Gyeongsang Natioinal Univ., Jinju, South Korea

fYear

2012

Firstpage

1

Lastpage

4

Abstract

In this study, AAO templates were fabricated by two steps anodizing processes and then crystallized. For the crystallization, TG/DTA analysis was performed and determined crystallizing condition. The structural properties were observed for the using host material of nanometer scale device like humidity sensor or gas sensor etc. by Scanning electron microscope (SEM), X-ray diffraction patterns and transmission electron microscope (TEM). The crystallized AAO layer showed the typical XRD pattern of polycrystalline structure with the γ-(Al₂O₃)_1.333 phase. And through the selected area electron diffraction (SAED) patterns showed that the AAO was crystallized.

Keywords

X-ray diffraction; alumina; anodisation; crystal growth from solution; crystal structure; crystallisation; differential thermal analysis; electron diffraction; scanning electron microscopy; transmission electron microscopy; AAO template; Al₂O₃; SAED pattern; SEM; TEM; TG-DTA analysis; X-ray diffraction patterns; anodizing processes; crystallization; gas sensor; host material; humidity sensor; nanometer scale device; polycrystalline structure; scanning electron microscopy; selected area electron diffraction; sensor applications; structural properties; transmission electron microscopy; typical XRD pattern; Aluminum oxide; Chemicals; Crystallization; Liquids; Shape; Substrates; X-ray diffraction;

fLanguage

English

Publisher

ieee

Conference_Titel

Nanotechnology (IEEE-NANO), 2012 12th IEEE Conference on

Conference_Location

Birmingham

ISSN

1944-9399

Print_ISBN

978-1-4673-2198-3

Type

conf

DOI

10.1109/NANO.2012.6321933

Filename

6321933