Title :
Fabry-Pérot resonator with nanostructures for multispectral visible filtering
Author :
Walls, Kirsty ; Chen, Qin ; Cumming, David R S ; Drysdale, Timothy D.
Author_Institution :
Univ. of Glasgow, Glasgow, UK
Abstract :
We design, fabricate and characterise examples of a narrowband filter that is intended for post-processing onto complementary-metal oxide-semiconductor (CMOS) imaging sensors to make compact multispectral imaging instruments. The filter is based on a Fabry-Pérot cavity, with the centre frequency of the filter controlled by patterning subwavelength holes into the structure using electron beam lithography and dry etching. We show that even though the top mirror layer has holes, acceptable performance is obtained with full width half maximums in the range 46-60 nm and a full visible band free spectral range. We present simulations of a set of 16 filters spanning the visible range (400-750nm) requiring only 5 separate lithography cycles.
Keywords :
CMOS image sensors; Fabry-Perot resonators; electron beam lithography; etching; mirrors; nanophotonics; optical design techniques; optical fabrication; optical filters; visible spectra; Fabry-Perot cavity resonator; centre frequency; compact multispectral imaging instruments; complementary-metal oxide-semiconductor imaging sensors; dry etching; electron beam lithography; full visible band free spectral range; full width half maximums; mirror layer; multispectral visible filtering; nanostructures; narrowband filter; subwavelength holes; wavelength 400 nm to 750 nm; wavelength 46 nm to 60 nm; Cavity resonators; Finite difference methods; Lithography; Mirrors; Narrowband; Optical filters; Resonator filters;
Conference_Titel :
Nanotechnology (IEEE-NANO), 2012 12th IEEE Conference on
Conference_Location :
Birmingham
Print_ISBN :
978-1-4673-2198-3
DOI :
10.1109/NANO.2012.6321940
