Analytic modeling and FEM simulation of a resonant micromachined magnetic field sensor

Author

Bahreyni, Behraad ; Shafai, Cyns

Author_Institution

Dept. of Electr. & Comput. Eng., Manitoba Univ., Winnipeg, Man., Canada

Volume

1

fYear

2004

Firstpage

189

Abstract

In this paper, analytic modeling and simulation results are described for a new design of micromachined resonant magnetic field sensor. The sensing methodology for this design is based on measuring the shift in the resonant frequency of an electrostatic comb-drive resonator, when the sensor is exposed to an external magnetic field. An analytic model of the sensor is derived and its results are compared against those obtained from finite element simulations in ANSYS. The finite element simulation results suggest that the sensitivity of the sensor is about 213 Hz/T.

Keywords

electrostatic devices; finite element analysis; magnetic sensors; micromechanical resonators; microsensors; FEM simulation; electrostatic comb-drive resonator; external magnetic field; micromachined sensor; resonant magnetic field sensor; resonator resonant frequency shift; Analytical models; Design methodology; Electrostatic measurements; Finite element methods; Frequency measurement; Magnetic analysis; Magnetic field measurement; Magnetic resonance; Magnetic sensors; Sensor phenomena and characterization;

fLanguage

English

Publisher

ieee

Conference_Titel

Electrical and Computer Engineering, 2004. Canadian Conference on

ISSN

0840-7789

Print_ISBN

0-7803-8253-6

Type

conf

DOI

10.1109/CCECE.2004.1344988

Filename

1344988