Title :
Analysis of Micro Flow Sensor using Excel Spreadsheet
Author :
Kim, Tae Yong ; Chung, Wan-Young
Author_Institution :
Div. of Comput. & Inf. Eng., Dongseo Univ., Busan
Abstract :
The micro flow sensor with multiple temperature sensing elements on silicon substrate was proposed and fabricated for the flow sensor to measure wide flow range. To evaluate optimal spacing between central heater and each sensing element pair, a heat transfer equation in steady state was formulated to be finite difference equation in rectangular grid space. The numerical solutions using Excel Spreadsheet and VBA macros were set. From the results of numerical modeling and simulation, the micro flow sensor with multiple temperature sensing elements can be optimized to wide range flow velocity by the determination of the optimum spacing between central heater and each sensing element
Keywords :
finite difference methods; flow sensors; microsensors; spreadsheet programs; Excel Spreadsheet; finite difference equation; heat transfer equation; micro flow sensor; numerical modeling; numerical simulation; temperature sensing elements; Difference equations; Finite difference methods; Fluid flow measurement; Heat transfer; Numerical models; Silicon; Space heating; Steady-state; Temperature distribution; Temperature sensors; Excel spreadsheet; Finite Difference Method; Micro Flow Sensor; Thermal Transfer;
Conference_Titel :
SICE-ICASE, 2006. International Joint Conference
Conference_Location :
Busan
Print_ISBN :
89-950038-4-7
Electronic_ISBN :
89-950038-5-5
DOI :
10.1109/SICE.2006.314615
