Title :
Fabrication and characterization of carbon nanotubes as r.f. interconnects
Author :
Hao, L. ; Cox, D. ; Lees, K. ; Gallop, J.C. ; See, P. ; Clarke, R. ; Janssen, T.J.B.M. ; Zhang, R.F. ; Wei, F.
Author_Institution :
Nat. Phys. Lab., Teddington, UK
Abstract :
In this paper we describe the design and implementation of a coplanar waveguide structure (CPW) and its use as a basis for characterizing the properties of a number of different types of carbon nanotubes. We report on the issues involved in integrating nanotubes with conventional scale photolithograpically patterned substrates and we model the measured response of the resulting circuits to de-embed the CNT properties.
Keywords :
carbon nanotubes; coplanar waveguides; CNT; CPW; carbon nanotubes; coplanar waveguide structure; photolithograpically patterned substrate; r.f. interconnects; Electrodes; Gold; Imaging; Integrated circuit interconnections; Laboratories; Nitrogen; Semiconductor device measurement;
Conference_Titel :
Nanotechnology (IEEE-NANO), 2012 12th IEEE Conference on
Conference_Location :
Birmingham
Print_ISBN :
978-1-4673-2198-3
DOI :
10.1109/NANO.2012.6322012
