DocumentCode
1599116
Title
Controlled electrosharpening of tungsten probes
Author
Stone, Richard ; Rosamond, Mark ; Coleman, Karl ; Petty, Mike ; Kosolov, Oleg ; Zeze, Dagou
Author_Institution
Sch. of Eng., Durham Univ., Durham, UK
fYear
2012
Firstpage
1
Lastpage
4
Abstract
Ultra-sharp tungsten probes are essential to a wide variety of applications in nanotechnology. In scanning probe microscopy, field emission microscopy, neurobiology and many other applications these tools provide a means of physically interacting with the nanoscopic world. A new technique for creating these probes has been developed to overcome current limitations in conventional drop-off methods - such as restricted aspect ratio, length and irreversibility during processing. A key advantage of this process is that it has been automated to allow the user to select the probe shape desired without resorting to manual or mechanical intervention. The probes are fabricated to tip radii in the order of 10nm over a range of lengths from 0.5 - 4.5 mm.
Keywords
etching; field emission ion microscopy; ion-molecule reactions; nanotechnology; probes; scanning probe microscopy; tungsten; W; aspect ratio; controlled electrosharpening; current limitations; drop-off methods; field emission microscopy; manual intervention; mechanical intervention; nanoscopic world; nanotechnology; neurobiology; probe shape; radius 10 nm; scanning probe microscopy; size 0.5 mm to 4.5 mm; ultrasharp tungsten probes; Anodes; Automation; Biology; Cathodes; Current measurement; Dielectrophoresis; Process control;
fLanguage
English
Publisher
ieee
Conference_Titel
Nanotechnology (IEEE-NANO), 2012 12th IEEE Conference on
Conference_Location
Birmingham
ISSN
1944-9399
Print_ISBN
978-1-4673-2198-3
Type
conf
DOI
10.1109/NANO.2012.6322013
Filename
6322013
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