Title :
Characterization for surface morphology of Ag particles on ZnO film
Author :
Feng Han ; Shuming Yang ; Kun Zhang ; Chenying Wang ; Zhuangde Jiang
Author_Institution :
State Key Lab. for Manuf. Syst. Eng., Xi´an Jiaotong Univ., Xi´an, China
Abstract :
In this paper, the influence of sputtering time of silver (Ag) particles and thermal treatment on the surface morphology of Ag particles on Zinc Oxide (ZnO) film has been studied. The size and density of Ag particles are measured using an atomic force microscopy (AFM) and a scanning electron microscope (SEM). The experimental results show that the size of Ag particles and the roughness (Ra) increases when sputtering time of Ag particles and thermal treatment temperature increases.
Keywords :
II-VI semiconductors; atomic force microscopy; particle size; scanning electron microscopy; semiconductor growth; semiconductor thin films; silver; sputter deposition; surface morphology; surface roughness; thermal analysis; wide band gap semiconductors; zinc compounds; AFM; Ag; SEM; ZnO; atomic force microscopy; particle density; particle size; scanning electron microscopy; sputtering time; surface morphology; surface roughness; thermal treatment; thin films; Films; Glass; Microscopy; Plasmons; Zinc oxide;
Conference_Titel :
Nanotechnology (IEEE-NANO), 2012 12th IEEE Conference on
Conference_Location :
Birmingham
Print_ISBN :
978-1-4673-2198-3
DOI :
10.1109/NANO.2012.6322021
