Characterization for surface morphology of Ag particles on ZnO film

Author

Feng Han ; Shuming Yang ; Kun Zhang ; Chenying Wang ; Zhuangde Jiang

Author_Institution

State Key Lab. for Manuf. Syst. Eng., Xi´an Jiaotong Univ., Xi´an, China

fYear

2012

Firstpage

1

Lastpage

4

Abstract

In this paper, the influence of sputtering time of silver (Ag) particles and thermal treatment on the surface morphology of Ag particles on Zinc Oxide (ZnO) film has been studied. The size and density of Ag particles are measured using an atomic force microscopy (AFM) and a scanning electron microscope (SEM). The experimental results show that the size of Ag particles and the roughness (Ra) increases when sputtering time of Ag particles and thermal treatment temperature increases.

Keywords

II-VI semiconductors; atomic force microscopy; particle size; scanning electron microscopy; semiconductor growth; semiconductor thin films; silver; sputter deposition; surface morphology; surface roughness; thermal analysis; wide band gap semiconductors; zinc compounds; AFM; Ag; SEM; ZnO; atomic force microscopy; particle density; particle size; scanning electron microscopy; sputtering time; surface morphology; surface roughness; thermal treatment; thin films; Films; Glass; Microscopy; Plasmons; Zinc oxide;

fLanguage

English

Publisher

ieee

Conference_Titel

Nanotechnology (IEEE-NANO), 2012 12th IEEE Conference on

Conference_Location

Birmingham

ISSN

1944-9399

Print_ISBN

978-1-4673-2198-3

Type

conf

DOI

10.1109/NANO.2012.6322021

Filename

6322021