Title :
Nucleation and growth of epitaxial SrRuO3 thin films on vicinal (001) SrTiO3 substrates
Author :
Lee, Ki-Seong ; Lee, Min Ku ; Jang, Changhyun ; Kim, Dong Min
Author_Institution :
Dept. of Mater. Sci. & Eng., Hongik Univ., Yeongi, South Korea
Abstract :
We reports the initial stage nucleation and growth of epitaxial SrRuO3 thin films grown on miscut single crystal (001) SrTiO3 substrates by 90 off-axis magnetron sputtering. Atomic force microscopy (AFM) indicates a difference in the initial stage growth of SrRuO3 films on the different miscut substrates. Lower miscut substrates showed much better step-flow growth. On the other hand, higher miscut substrates showed step bunching or islands growth. Such studies on the initial stage nucleation will also help us understanding the growth kinetics and development of surface morphology and interfaces in thin film heterostructures and devices.
Keywords :
atomic force microscopy; epitaxial layers; nucleation; sputter deposition; strontium compounds; vapour phase epitaxial growth; AFM; SrRuO3; SrTiO3; atomic force microscopy; epitaxial thin film growth; epitaxial thin film nucleation; growth kinetics; initial stage growth; initial stage nucleation; island growth; miscut single crystal (001) substrates; off-axis magnetron sputtering; step bunching; step-flow growth; surface morphology development; thin film devices; thin film heterostructures; vicinal (001) substrates; Colossal magnetoresistance; Fabrication; Facsimile; Films; Magnetic properties; Magnetic resonance imaging; Substrates;
Conference_Titel :
Nanotechnology (IEEE-NANO), 2012 12th IEEE Conference on
Conference_Location :
Birmingham
Print_ISBN :
978-1-4673-2198-3
DOI :
10.1109/NANO.2012.6322030
