Abstract :
The following topics are dealt with: semiconductor device process technology; semiconductor device modelling; sensors; actuators; micro-nanosystem; reliability; and solar energy.
Keywords :
microactuators; microsensors; reliability; semiconductor device models; solar power; actuators; microsystem; nanosystem; reliability; semiconductor device modelling; semiconductor device process technology; sensors; solar energy;
Conference_Titel :
Electron Devices (CDE), 2013 Spanish Conference on
Conference_Location :
Valladolid
Print_ISBN :
978-1-4673-4666-5
Electronic_ISBN :
978-1-4673-4667-2
DOI :
10.1109/CDE.2013.6481320
