DocumentCode
1600273
Title
Gas-lubricated micro-bearings for microactuators
Author
Huang, J.-B. ; Tong, Q.-Y. ; Mao, P.-S.
Author_Institution
Microelectron. Center, South-East Univ., Nanjing, China
fYear
1991
Firstpage
894
Lastpage
897
Abstract
The advantages and scale-down of gas lubricated bearings are discussed. The effect of molecular mean free path on the bearing is considered. An aerodynamic spiral grooved microbearing and an externally pressurized microbearing have been designed and fabricated by processes derived from the IC fabrication process. They have been used in micromotors with a rotor diameter of 60 mu m and a hub diameter of 20 mu m.<>
Keywords
electric actuators; integrated circuit technology; machine bearings; micromechanical devices; small electric machines; 20 micron; 60 micron; IC fabrication; aerodynamic spiral grooved microbearing; externally pressurized microbearing; gas lubricated bearings; hub diameter; microactuators; micromotors; molecular mean free path; rotor diameter; scale-down; Actuators; Aerodynamics; Contamination; Equations; Friction; Insulators; Lubricants; Manufacturing; Microactuators; Temperature distribution;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Sensors and Actuators, 1991. Digest of Technical Papers, TRANSDUCERS '91., 1991 International Conference on
Conference_Location
San Francisco, CA, USA
Print_ISBN
0-87942-585-7
Type
conf
DOI
10.1109/SENSOR.1991.149030
Filename
149030
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