DocumentCode
1600312
Title
Bitline separated gated multi-bit (BS-GMB) SONOS for high density flash memory
Author
Shim, Won Bo ; Kim, Seunghyun ; Kim, Yoon ; Park, Se Hwan ; Kim, Sungjun ; Park, Euyhwan ; Park, Byung-Gook
Author_Institution
Inter-Univ. Semicond. Res. Center (ISRC), Seoul Nat. Univ., Seoul, South Korea
fYear
2012
Firstpage
1
Lastpage
4
Abstract
A novel bitline separated gated multi-bit (BS-GMB) SONOS memory for high density flash memory is newly introduced. Bitline separation method can decrease the number of gate contacts, and simplify the gate contact interconnection. 2N memory nodes with single crystalline silicon channel can be realized in 8F2 size with this structure.
Keywords
flash memories; BS-GMB SONOS memory; bitline separation method; gate contact interconnection; gated multibit SONOS memory; high density flash memory; single crystalline silicon channel; Flash memory; Logic gates; Periodic structures; SONOS devices; Stacking;
fLanguage
English
Publisher
ieee
Conference_Titel
Nanotechnology (IEEE-NANO), 2012 12th IEEE Conference on
Conference_Location
Birmingham
ISSN
1944-9399
Print_ISBN
978-1-4673-2198-3
Type
conf
DOI
10.1109/NANO.2012.6322053
Filename
6322053
Link To Document