• DocumentCode
    1600377
  • Title

    Direct-write patterning of metals and graphene oxide electrodes by arc erosion for organic device manufacturing

  • Author

    Garcia-Velez, M. ; Alvarez, A.L. ; Coya, C. ; Alvarado, G. ; Diez-Betriu, X. ; de Andres, A. ; Jimenez-Trillo, J.

  • Author_Institution
    Dept. Tecnol. Electron. ESCET, Univ. Rey Juan Carlos, Madrid, Spain
  • fYear
    2013
  • Firstpage
    13
  • Lastpage
    16
  • Abstract
    Electric arc erosion performed at low continuous voltages has been recently proven as a successful patterning technique for thin films of different conductive materials. In this work, we present an application of this procedure to materials typically aimed for device electrodes, such as indium tin oxide (ITO), gold (Au), graphene oxide (GO) or aluminum doped zinc oxide (AZO), as well as a more in depth study of the electrical discharge generation at submicron scale, which allows optimizing the procedure.
  • Keywords
    arcs (electric); electrodes; gold; graphene; indium compounds; semiconductor device manufacture; tin compounds; Au; CO; ITO; aluminum doped zinc oxide; conductive materials; device electrodes; direct-write patterning; electric arc erosion; electrical discharge generation; gold; graphene oxide electrodes; indium tin oxide; metals; organic device manufacturing; submicron scale; thin films; Electrodes; Glass; Gold; Graphene; Indium tin oxide; Probes; arc erosion; displa; graphene oxide; organic devices; organic solar cell;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electron Devices (CDE), 2013 Spanish Conference on
  • Conference_Location
    Valladolid
  • Print_ISBN
    978-1-4673-4666-5
  • Electronic_ISBN
    978-1-4673-4667-2
  • Type

    conf

  • DOI
    10.1109/CDE.2013.6481330
  • Filename
    6481330