DocumentCode
1600377
Title
Direct-write patterning of metals and graphene oxide electrodes by arc erosion for organic device manufacturing
Author
Garcia-Velez, M. ; Alvarez, A.L. ; Coya, C. ; Alvarado, G. ; Diez-Betriu, X. ; de Andres, A. ; Jimenez-Trillo, J.
Author_Institution
Dept. Tecnol. Electron. ESCET, Univ. Rey Juan Carlos, Madrid, Spain
fYear
2013
Firstpage
13
Lastpage
16
Abstract
Electric arc erosion performed at low continuous voltages has been recently proven as a successful patterning technique for thin films of different conductive materials. In this work, we present an application of this procedure to materials typically aimed for device electrodes, such as indium tin oxide (ITO), gold (Au), graphene oxide (GO) or aluminum doped zinc oxide (AZO), as well as a more in depth study of the electrical discharge generation at submicron scale, which allows optimizing the procedure.
Keywords
arcs (electric); electrodes; gold; graphene; indium compounds; semiconductor device manufacture; tin compounds; Au; CO; ITO; aluminum doped zinc oxide; conductive materials; device electrodes; direct-write patterning; electric arc erosion; electrical discharge generation; gold; graphene oxide electrodes; indium tin oxide; metals; organic device manufacturing; submicron scale; thin films; Electrodes; Glass; Gold; Graphene; Indium tin oxide; Probes; arc erosion; displa; graphene oxide; organic devices; organic solar cell;
fLanguage
English
Publisher
ieee
Conference_Titel
Electron Devices (CDE), 2013 Spanish Conference on
Conference_Location
Valladolid
Print_ISBN
978-1-4673-4666-5
Electronic_ISBN
978-1-4673-4667-2
Type
conf
DOI
10.1109/CDE.2013.6481330
Filename
6481330
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