The development of microwave plasma device for nanoparticles´ preparation

Summary form only given. Microwave plasma is considered to be more suitable for magnetic nanoparticles´ preparation with its advantages of moderate power density, high activity and non-electrode. This paper develops a microwave plasma equipment system for nanoparticle s´ synthesis, based on the previously developed open type microwave plasma source. The waveguide cavity is sealed by self-sealing sliding short and quartz glass plate to ensure the purity of materials and the height of reaction zone is adjustable to ad apt different height of plasma. Through CST electromagnetic simulation, the dimensions of cavity and the tuning parameters are optimized. The emission spectra of microwave plasma in different positi ons are measured to analyze the active ingredients by charact eristic spectrum, and get the rough distribution regularities of plasma temperature. This device can produce stable microwa ve plasma of various gases in low power shows,and it runs steady-going by our preliminary testing.