Design and fabrication of sensor structures for the measurement of toxic gases

Author

Gonzalez-Chavarri, J. ; Castro-Hurtado, I. ; Mandayo, G.G. ; Castano, E.

Author_Institution

Microelectron. & Microsyst. Unit, Ceit & Tecnun (Univ. of Navarra), San Sebastián, Spain

fYear

2013

Firstpage

107

Lastpage

110

Abstract

In this paper the direct growth of ZnO nanostructures onto a sensing device for benzene gas sensing is presented. This sensor consists in an alumina substrate with platinum interdigitated microelectrodes and a Pt heater. The nanostructure growth process is based on a vapor-liquid-solid method starting from a RF sputtered Zn thin film.

Keywords

II-VI semiconductors; chemical variables measurement; gas sensors; nanofabrication; nanosensors; nanostructured materials; organic compounds; semiconductor growth; sputter deposition; thin film devices; wide band gap semiconductors; zinc compounds; Al₂O₃; Pt; RF sputtered thin film; ZnO; alumina substrate; benzene gas sensing; platinum interdigitated microelectrodes; sensing device; sensor structure design; sensor structure fabrication; toxic gas measurement; vapor-liquid-solid method; Electrodes; Fabrication; Heating; Materials; Nanostructures; Surface morphology; Zinc oxide; VLS; Zinc Oxide; benzene; gas sensor; nanostructure;

fLanguage

English

Publisher

ieee

Conference_Titel

Electron Devices (CDE), 2013 Spanish Conference on

Conference_Location

Valladolid

Print_ISBN

978-1-4673-4666-5

Electronic_ISBN

978-1-4673-4667-2

Type

conf

DOI

10.1109/CDE.2013.6481354

Filename

6481354