Title :
Design and fabrication of sensor structures for the measurement of toxic gases
Author :
Gonzalez-Chavarri, J. ; Castro-Hurtado, I. ; Mandayo, G.G. ; Castano, E.
Author_Institution :
Microelectron. & Microsyst. Unit, Ceit & Tecnun (Univ. of Navarra), San Sebastián, Spain
Abstract :
In this paper the direct growth of ZnO nanostructures onto a sensing device for benzene gas sensing is presented. This sensor consists in an alumina substrate with platinum interdigitated microelectrodes and a Pt heater. The nanostructure growth process is based on a vapor-liquid-solid method starting from a RF sputtered Zn thin film.
Keywords :
II-VI semiconductors; chemical variables measurement; gas sensors; nanofabrication; nanosensors; nanostructured materials; organic compounds; semiconductor growth; sputter deposition; thin film devices; wide band gap semiconductors; zinc compounds; Al2O3; Pt; RF sputtered thin film; ZnO; alumina substrate; benzene gas sensing; platinum interdigitated microelectrodes; sensing device; sensor structure design; sensor structure fabrication; toxic gas measurement; vapor-liquid-solid method; Electrodes; Fabrication; Heating; Materials; Nanostructures; Surface morphology; Zinc oxide; VLS; Zinc Oxide; benzene; gas sensor; nanostructure;
Conference_Titel :
Electron Devices (CDE), 2013 Spanish Conference on
Conference_Location :
Valladolid
Print_ISBN :
978-1-4673-4666-5
Electronic_ISBN :
978-1-4673-4667-2
DOI :
10.1109/CDE.2013.6481354
