Title :
Microfluidic impulsion system manufactured by PCB-MEMS for Lab on a Chip
Author :
Aracil, Carmen ; Perdigones, Francisco Antonio ; Luque, Antonio ; Quero, Jose M.
Author_Institution :
Sch. of Eng., Univ. of Seville, Seville, Spain
Abstract :
A low-cost microfluidic impulsion system has been manufactured by a combination of SU-8 processing and PCB-MEMS technology. It is a driven pressure impulsion system, activated by an one-shot microvalve. The connection of pressurized chambers is achieved by means of the destruction of the microvalve, and the impulsion is performed. The connections to external pumps are then avoided. The proposed design also allows the integration between electronic and microfluidic elements. Benefits of a well-known processing technique, low-cost and its wide applications can be highlighted. The fabrication and evaluation of the system has been carried out with successful results. The device is intended to be integrated in Lab on a Chip (LOC) platform in order to achieve an autonomous device.
Keywords :
lab-on-a-chip; microfluidics; microvalves; printed circuit design; LOC platform; PCB-MEMS technology; SU-8 processing; autonomous device; electronic elements; external pump; lab on a chip; low-cost microfluidic impulsion system; microfluidic elements; microvalve destruction; one-shot microvalve; pressure impulsion system; pressurized chamber; system evaluation; system fabrication; Copper; Etching; Fabrication; Materials; Micromechanical devices; Microvalves; Propulsion; Lab on a Chip; Microfluidics microvalve; PCB-MEMS; SU-8; impulsion;
Conference_Titel :
Electron Devices (CDE), 2013 Spanish Conference on
Conference_Location :
Valladolid
Print_ISBN :
978-1-4673-4666-5
Electronic_ISBN :
978-1-4673-4667-2
DOI :
10.1109/CDE.2013.6481360
