• DocumentCode
    1601233
  • Title

    Macroporous silicon photonic crystals for gas sensing

  • Author

    Vega, David ; Reina, Jordi ; Rodriguez, Alex

  • Author_Institution
    Dept. d´Eng. Electron., Univ. Politec. de Catalunya, Barcelona, Spain
  • fYear
    2013
  • Firstpage
    143
  • Lastpage
    146
  • Abstract
    In this paper we study a compact gas sensor based on a photonic crystal built from macroporous silicon. Its sensing mechanism is based in the absorption of infrared light by a gas. Photonic crystals are structured materials which can be engineered to have photonic bandgaps. They also can be tailored to create localized states inside the bandgaps. We exploit the possibility to confine light inside a cavity with very high-Q, which allows for long interaction time between the gas and light. Simulation of different 2-D and 3-D structures have been done to extract the appropriate dimensions for gas detection, and their optical behaviour. Resonant cavities were created by adding defects in the ordered geometrical structure, thus creating a single state and confining the trapped light in a crystal bandgap. The structures were tested by simulating the presence of ethanol inside the structures. Gas is to be detected by a noticeable change in the resonance peak both in amplitude and spread, caused by the gas detuning the cavity. Macroporous silicon samples of the investigated structures with defects were fabricated and measured by IR spectrography. Cavity resonances can be clearly seen in the samples, though we need to improve fabrication to adjust the theoretically calculated dimensions.
  • Keywords
    cavity resonators; crystal defects; elemental semiconductors; gas sensors; infrared detectors; infrared spectroscopy; optical sensors; photonic band gap; photonic crystals; porous semiconductors; resonance; silicon; 2D structure; 3D structure; IR spectrography; crystal bandgap; defect; gas detection; gas detuning; gas sensor; high-Q; infrared light absorption; localized state; macroporous photonic crystal; optical behaviour; ordered geometrical structure; photonic bandgap; resonant cavity; structured material; trapped light; Cavity resonators; Gas detectors; Photonic band gap; Silicon; Gas sensing; Macroporous silicon; Photonic crystal;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electron Devices (CDE), 2013 Spanish Conference on
  • Conference_Location
    Valladolid
  • Print_ISBN
    978-1-4673-4666-5
  • Electronic_ISBN
    978-1-4673-4667-2
  • Type

    conf

  • DOI
    10.1109/CDE.2013.6481363
  • Filename
    6481363