Title :
A calibration algorithm for nearfield scanning microwave microscopes
Author :
Hoffmann, Johannes ; Wollensack, Michael ; Zeier, Markus ; Niegemann, Jens ; Huber, Hans-Peter ; Kienberger, Ferry
Author_Institution :
RF & Microwave Lab. of the Nat. Metrol. Inst. of Switzerland (METAS), Bern-Wabern, Switzerland
Abstract :
This paper presents a new algorithm for the calibration of nearfield scanning microwave microscopes. By adopting techniques known from vector network analyzer calibration, a nearfield scanning microwave microscope can be calibrated at a specific microwave frequency with three standards. The advantages compared to existing calibration methods are that the calibration is valid for all possible samples and that the measurements require less time than other algorithms.
Keywords :
calibration; near-field scanning optical microscopy; adopting techniques; calibration algorithm; microwave frequency; nearfield scanning microwave microscopes; vector network analyzer calibration; Atomic measurements; Power capacitors;
Conference_Titel :
Nanotechnology (IEEE-NANO), 2012 12th IEEE Conference on
Conference_Location :
Birmingham
Print_ISBN :
978-1-4673-2198-3
DOI :
10.1109/NANO.2012.6322116
