DocumentCode
1603197
Title
Fabrication of gating nanopore towards single-biomolecule electrical identification
Author
Sasaki, Yuta ; Ohshiro, Takahito ; Kawano, Satoyuki ; Taniguchi, Masateru ; Kawai, Tomoji
Author_Institution
Eng. Dept., Osaka Univ., Suita, Japan
fYear
2012
Firstpage
1
Lastpage
5
Abstract
We developed a simple fabrication method for a gating nanopore nanostructure, which is composed of a solid-state nanopore and embodied nanogap-electrode inside the nanopore. The method by using deep reactive-ion etching technique achieved a high-yield rate and easily controlled the pore-length for the gating nanopore device. In addition, by using the gating nanopore, we investigated single-particles / biomolecules that pass through a nanopore only by change in electric current not only flowing parallel to a nanopore, but also flowing between nanogap electrodes perpendicular to the nanopore. From the ionic current intensity and its time profiles, we identify a sample single-particles/bioanalytes. The electrical measurement by using gating nanopore would be a promising methodology for single-biomolecule sensors.
Keywords
biomolecular electronics; electric current; electrodes; nanoelectronics; sputter etching; biomolecules; deep reactive-ion etching technique; electric current; electrical measurement; embodied nanogap-electrode; fabrication method; gating nanopore device; gating nanopore nanostructure; high-yield rate; ionic current intensity; nanogap electrode; pore-length; single-biomolecule electrical identification; single-biomolecule sensor; single-particles/bioanalytes; solid-state nanopore; Atmospheric measurements; Current measurement; Metals; Particle measurements; Radio frequency; Standards;
fLanguage
English
Publisher
ieee
Conference_Titel
Nanotechnology (IEEE-NANO), 2012 12th IEEE Conference on
Conference_Location
Birmingham
ISSN
1944-9399
Print_ISBN
978-1-4673-2198-3
Type
conf
DOI
10.1109/NANO.2012.6322152
Filename
6322152
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