• DocumentCode
    1603197
  • Title

    Fabrication of gating nanopore towards single-biomolecule electrical identification

  • Author

    Sasaki, Yuta ; Ohshiro, Takahito ; Kawano, Satoyuki ; Taniguchi, Masateru ; Kawai, Tomoji

  • Author_Institution
    Eng. Dept., Osaka Univ., Suita, Japan
  • fYear
    2012
  • Firstpage
    1
  • Lastpage
    5
  • Abstract
    We developed a simple fabrication method for a gating nanopore nanostructure, which is composed of a solid-state nanopore and embodied nanogap-electrode inside the nanopore. The method by using deep reactive-ion etching technique achieved a high-yield rate and easily controlled the pore-length for the gating nanopore device. In addition, by using the gating nanopore, we investigated single-particles / biomolecules that pass through a nanopore only by change in electric current not only flowing parallel to a nanopore, but also flowing between nanogap electrodes perpendicular to the nanopore. From the ionic current intensity and its time profiles, we identify a sample single-particles/bioanalytes. The electrical measurement by using gating nanopore would be a promising methodology for single-biomolecule sensors.
  • Keywords
    biomolecular electronics; electric current; electrodes; nanoelectronics; sputter etching; biomolecules; deep reactive-ion etching technique; electric current; electrical measurement; embodied nanogap-electrode; fabrication method; gating nanopore device; gating nanopore nanostructure; high-yield rate; ionic current intensity; nanogap electrode; pore-length; single-biomolecule electrical identification; single-biomolecule sensor; single-particles/bioanalytes; solid-state nanopore; Atmospheric measurements; Current measurement; Metals; Particle measurements; Radio frequency; Standards;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Nanotechnology (IEEE-NANO), 2012 12th IEEE Conference on
  • Conference_Location
    Birmingham
  • ISSN
    1944-9399
  • Print_ISBN
    978-1-4673-2198-3
  • Type

    conf

  • DOI
    10.1109/NANO.2012.6322152
  • Filename
    6322152