Title :
Integrated electroosmotic pumps and flow manifolds for total chemical analysis systems
Author :
Manz, A. ; Harrison, D.J. ; Fettinger, J.C. ; Verpoorte, E. ; Ludi, H. ; Widmer, H.M.
Author_Institution :
Ciba-Geigy AG, Basel, Switzerland
Abstract :
Following the trend towards smaller channel inner diameter for better separation performance and shorter channel length for shorter transport time, construction of miniaturized components for a total chemical analysis system using microlithographic methods is proposed. The system might include the so-called electroosmotic flow pump and valveless switching of flowpaths. An example structure for such a system, based on flow injection analysis and electrophoresis, is presented.<>
Keywords :
electric sensing devices; electrophoresis; etching; flow control; micromechanical devices; osmosis; photolithography; pumps; chemical sensors; electroosmotic flow pump; electrophoresis; etching; flow injection analysis; flow manifolds; flowpaths; integrated pumps; microlithographic methods; micromachining; miniaturized components; photolithography; total chemical analysis systems; valveless switching; Chemical analysis; Chemical industry; Chemical products; Chemical sensors; Chemistry; Control systems; Electrokinetics; Liquids; Performance analysis; Sampling methods;
Conference_Titel :
Solid-State Sensors and Actuators, 1991. Digest of Technical Papers, TRANSDUCERS '91., 1991 International Conference on
Conference_Location :
San Francisco, CA, USA
Print_ISBN :
0-87942-585-7
DOI :
10.1109/SENSOR.1991.149043
