Title :
Laser-assisted nanofabrication in the scanning electron microscope
Author :
Magel, Gregory A. ; Roberts, Nicholas A. ; Fowlkes, Jason D. ; Rack, Philip D. ; Hartfield, Cheryl D. ; Moore, Thomas M.
Author_Institution :
Oxford Instrum. Co., Omniprobe Inc., Dallas, TX, USA
Abstract :
A prototype apparatus was developed to deliver up to ~300 kW/cm2 of cw or pulsed near IR light to a sample inside a scanning electron microscope (SEM) or focused ion beam (FIB) instrument. Transient heating of localized areas around the electron or ion beam can be performed with fine control of power and pulse parameters, down to sub-microsecond durations. In conjunction with a gas injection system, electron beam induced deposition (EBID) of enhanced purity Pt and Au structures was demonstrated. Dynamics of pulsed laser induced solid-state dewetting of Ni and Au were also observed in real time in a SEM/FIB, which may lead to improved understanding and manipulation of self-assembled nanostructures.
Keywords :
ion beam assisted deposition; nanofabrication; power control; scanning electron microscopes; EBID; SEM-FIB; chemical vapor deposition; electron beam induced deposition; focused ion beam instrument; gas injection system; laser-assisted nanofabrication; power fine control; pulse parameters; pulsed laser induced solid-state dewetting; pulsed near IR light; scanning electron microscope; self-assembled nanostructures; submicrosecond duration; transient heating; Heating; Laser beams; Power lasers; Pulsed laser deposition; Semiconductor lasers; Substrates; Surface morphology; Electron Beam; Focused Ion Beam; Nanofabrication; Scanning Electron Microscopy; Self-assembly;
Conference_Titel :
Nanotechnology (IEEE-NANO), 2012 12th IEEE Conference on
Conference_Location :
Birmingham
Print_ISBN :
978-1-4673-2198-3
DOI :
10.1109/NANO.2012.6322202
