DocumentCode
1604649
Title
Low-drift gas sensor with on-chip instrumentation
Author
Schoneberg, U. ; Dura, H.G. ; Hosticka, B.J. ; Mokwa, W.
Author_Institution
Fraunhofer Inst. of Microelectron. Circuits & Syst., Duisburg, Germany
fYear
1991
Firstpage
1006
Lastpage
1007
Abstract
A hydrogen gas sensor device with an on-chip switched capacitor readout circuit is presented. This technique permits AC operation of capacitive gas sensors. It was demonstrated that on-chip analog instrumentation not only makes sensor readout and interfacing possible, but it can also improve long-term sensor behavior.<>
Keywords
electric sensing devices; gas sensors; hydrogen; switched capacitor networks; AC operation; H/sub 2/ sensor; capacitive gas sensors; long-term sensor behavior; low-drift gas sensor; on-chip analog instrumentation; on-chip instrumentation; on-chip switched capacitor readout circuit; Capacitance; Electrodes; Gas detectors; Instruments; Leakage current; MOS capacitors; Palladium; Pulse amplifiers; Switched capacitor circuits; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Sensors and Actuators, 1991. Digest of Technical Papers, TRANSDUCERS '91., 1991 International Conference on
Conference_Location
San Francisco, CA, USA
Print_ISBN
0-87942-585-7
Type
conf
DOI
10.1109/SENSOR.1991.149062
Filename
149062
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