Development of SAW pressure sensor using stainless steel diaphragm

Author

Dake, Y. ; Tokai, M.

Author_Institution

Akashi Tech. Inst., Hyogo, Japan

fYear

1991

Firstpage

1009

Abstract

Summary form only given. A frequency output pressure sensor based on surface acoustic wave (SAW) technology was developed. SAW pressure sensors were developed using stainless steel (AISI-630) diaphragms on which SAW resonators are directly fabricated; these sensors´ basic characteristics were estimated. The novel SAW pressure sensor consists of a stainless steel diaphragm, an insulating film (SiO/sub 2/:2 mu m thick), a piezoelectric film (ZnO: 20 mu m thick), electrodes (Al: 1000 AA thick), and electronic circuits. At present, the temperature characteristics of the sensors are not good, but it is expected that the sensors will have more accuracy by using temperature-compensating mechanisms.<>

Keywords

austenitic stainless steel; diaphragms; pressure transducers; surface acoustic wave devices; Al electrodes; SAW pressure sensor; SiO/sub 2/ film; ZnO film; frequency output pressure sensor; stainless steel diaphragm; temperature characteristics; temperature-compensating mechanisms; Acoustic sensors; Acoustic waves; Frequency; Insulation; Piezoelectric films; Sensor phenomena and characterization; Surface acoustic waves; Temperature sensors; Thick film sensors;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors and Actuators, 1991. Digest of Technical Papers, TRANSDUCERS '91., 1991 International Conference on

Conference_Location

San Francisco, CA, USA

Print_ISBN

0-87942-585-7

Type

conf

DOI

10.1109/SENSOR.1991.149064

Filename

149064