Large deflection performance of surface micromachined corrugated diaphragms

The large deflection performance was measured and modeled for its dependence on diaphragm geometries and corrugation parameters. Corrugated polyimide diaphragms of various diameters, corrugation frequencies, and thicknesses were fabricated using a surface micromachining technique. Current models correctly described the observed increase in deflection from corrugated diaphragms compared to deflections in flat diaphragms at equivalent loads. The models are extended with the definition of the transition deflection which delineates the transition between the small and large deflection regions. The range of corrugation quality factors available in surface micromachined diaphragms is determined, and predicted load-deflection curves are compared to measurements.<>