Title :
MI007: Galvanic piezoelectric RF MEMS switches
Author :
Wunnicke, O. ; Klee, M. ; Reimann, K. ; Renders, Ch. ; Esch, H. Van ; Keur, W. ; Zhao, J. ; de Wild, M. ; Roest, A.
Author_Institution :
NXP Semiconductors, Corporate I&T, High Tech Campus 4, 5656 AE Eindhoven, The Netherlands
Abstract :
Galvanic piezoelectric RF MEMS switches are presented. The switches are completely processed and characterized mechanically and electrically. The mechanic deformation and switching times are discussed. Closing of the switch can be achieved within less than 10 ??s. Electrical measurements yield contact resistances in the order of 50 ?? and isolation resistance of more than 1 G??.
Keywords :
Contact resistance; Electrical resistance measurement; Galvanizing; Low voltage; Microswitches; Optical interferometry; Piezoelectric actuators; Power semiconductor switches; Radio frequency; Radiofrequency microelectromechanical systems;
Conference_Titel :
Applications of Ferroelectrics, 2008. ISAF 2008. 17th IEEE International Symposium on the
Conference_Location :
Santa Re, NM, USA
Print_ISBN :
978-1-4244-2744-4
Electronic_ISBN :
1099-4734
DOI :
10.1109/ISAF.2008.4693747
