• DocumentCode
    1605093
  • Title

    MI007: Galvanic piezoelectric RF MEMS switches

  • Author

    Wunnicke, O. ; Klee, M. ; Reimann, K. ; Renders, Ch. ; Esch, H. Van ; Keur, W. ; Zhao, J. ; de Wild, M. ; Roest, A.

  • Author_Institution
    NXP Semiconductors, Corporate I&T, High Tech Campus 4, 5656 AE Eindhoven, The Netherlands
  • Volume
    2
  • fYear
    2008
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    Galvanic piezoelectric RF MEMS switches are presented. The switches are completely processed and characterized mechanically and electrically. The mechanic deformation and switching times are discussed. Closing of the switch can be achieved within less than 10 ??s. Electrical measurements yield contact resistances in the order of 50 ?? and isolation resistance of more than 1 G??.
  • Keywords
    Contact resistance; Electrical resistance measurement; Galvanizing; Low voltage; Microswitches; Optical interferometry; Piezoelectric actuators; Power semiconductor switches; Radio frequency; Radiofrequency microelectromechanical systems;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Applications of Ferroelectrics, 2008. ISAF 2008. 17th IEEE International Symposium on the
  • Conference_Location
    Santa Re, NM, USA
  • ISSN
    1099-4734
  • Print_ISBN
    978-1-4244-2744-4
  • Electronic_ISBN
    1099-4734
  • Type

    conf

  • DOI
    10.1109/ISAF.2008.4693747
  • Filename
    4693747
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1605093