Title :
Broadband permittivity measurements of thin-film ferroelectrics to 40 GHz
Author :
Orloff, Nathan D. ; Booth, James C. ; Murakami, Makoto ; Takeuchi, Ichiro
Author_Institution :
National Institute of Standards and Technology, Boulder, CO 80302, USA
Abstract :
We demonstrate a novel experimental technique to measure the complex permittivity of dielectric thin films over the frequency range from 100 Hz to 40 GHz. We apply this technique to determine the broadband permittivity for ferroelectric thin films such as PbTiO3 at room temperature. We discuss the value of such frequency-dependent measurements for determining the dielectric response of ferroelectric thin films at finite frequencies.
Keywords :
Capacitance measurement; Coplanar waveguides; Dielectric measurements; Dielectric thin films; Ferroelectric materials; Frequency measurement; Permittivity measurement; Substrates; Transistors; Transmission line measurements;
Conference_Titel :
Applications of Ferroelectrics, 2008. ISAF 2008. 17th IEEE International Symposium on the
Conference_Location :
Santa Re, NM, USA
Print_ISBN :
978-1-4244-2744-4
Electronic_ISBN :
1099-4734
DOI :
10.1109/ISAF.2008.4693752
