• DocumentCode
    1605240
  • Title

    Integrated BST capacitors and PZT actuators in tunable MW applications

  • Author

    Boettger, Ulrich ; Hennings, Alexander ; Kuegeler, Carsten ; Waser, Rainer

  • Author_Institution
    Institut fÿr Werkstoffe der Elektrotechnik II, RWTH Aachen University, 52056, Germany
  • Volume
    2
  • fYear
    2008
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    A presentation is given about recent realized microwave devices using the dielectric tunability of paraelectric BST as well as the piezoelectric actuation of ferroelectric PZT.
  • Keywords
    Actuators; Band pass filters; Binary search trees; Capacitors; Coplanar waveguides; Dielectric thin films; Ferroelectric films; Frequency; Resonance; Voltage;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Applications of Ferroelectrics, 2008. ISAF 2008. 17th IEEE International Symposium on the
  • Conference_Location
    Santa Re, NM, USA
  • ISSN
    1099-4734
  • Print_ISBN
    978-1-4244-2744-4
  • Electronic_ISBN
    1099-4734
  • Type

    conf

  • DOI
    10.1109/ISAF.2008.4693756
  • Filename
    4693756
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1605240