Title :
Integrated BST capacitors and PZT actuators in tunable MW applications
Author :
Boettger, Ulrich ; Hennings, Alexander ; Kuegeler, Carsten ; Waser, Rainer
Author_Institution :
Institut fÿr Werkstoffe der Elektrotechnik II, RWTH Aachen University, 52056, Germany
Abstract :
A presentation is given about recent realized microwave devices using the dielectric tunability of paraelectric BST as well as the piezoelectric actuation of ferroelectric PZT.
Keywords :
Actuators; Band pass filters; Binary search trees; Capacitors; Coplanar waveguides; Dielectric thin films; Ferroelectric films; Frequency; Resonance; Voltage;
Conference_Titel :
Applications of Ferroelectrics, 2008. ISAF 2008. 17th IEEE International Symposium on the
Conference_Location :
Santa Re, NM, USA
Print_ISBN :
978-1-4244-2744-4
Electronic_ISBN :
1099-4734
DOI :
10.1109/ISAF.2008.4693756
