Title :
C-V advisor knowledge base (CVA-KB): a high frequency C-V plot analysis tool
Author_Institution :
Intel Corp., Santa Clara, CA, USA
Abstract :
A high-frequency capacitance-voltage (C-V) plot analysis tool, the CVA-KB, has been developed using an expert system shell. The CVA-KB is designed to be used by semiconductor diffusion engineers and technicians to help solve problems with the interpretation of C-V plots and to suggest a course of action in the solution of diffusion area problems as revealed by C-V analysis. The CVA-KB also aids in the training of C-V plot interpretation by providing a context-sensitive on-line help system
Keywords :
characteristics measurement; computerised instrumentation; doping profiles; electronic engineering computing; expert systems; semiconductor device testing; C-V advisor knowledge base; C-V plot analysis tool; MOS capacitors; charge density; contamination; context-sensitive on-line help; doping profile; expert system shell; semiconductor diffusion engineers; training; Capacitance-voltage characteristics; Design engineering; Expert systems; Frequency; Knowledge engineering; Measurement errors; Pollution measurement; Production systems; Systems engineering and theory; Voltage;
Conference_Titel :
Instrumentation and Measurement Technology Conference, 1991. IMTC-91. Conference Record., 8th IEEE
Conference_Location :
Atlanta, GA
Print_ISBN :
0-87942-579-2
DOI :
10.1109/IMTC.1991.161658
