Title :
Electrically-activated, normally-closed diaphragm valves
Author_Institution :
IC Sensors, Milpitas, CA, USA
Abstract :
Electrically activated, normally closed diaphragm valves have been fabricated using heated bimetallic diaphragms to provide the operating force. These valves have been designed to provide fully proportional control of flows in the range of 0-150 cm/sup 3//min at input pressures between 1 and 50 PSIG. The valves are batch-fabricated using silicon micromachining techniques. By combining these valves with pressure or flow sensing elements, closed-loop pressure or flow control is easily accomplished.<>
Keywords :
bimetals; closed loop systems; diaphragms; electric actuators; flow control; micromechanical devices; pressure control; proportional control; silicon; valves; Si diaphragm; Si micromachining techniques; batch-fabricated; closed-loop control; electrically actuated valves; flow control; heated bimetallic diaphragms; normally-closed diaphragm valves; pressure control; proportional control; Actuators; Aluminum; Assembly; Micromachining; Pressure control; Resistance heating; Resistors; Silicon; Thermal force; Valves;
Conference_Titel :
Solid-State Sensors and Actuators, 1991. Digest of Technical Papers, TRANSDUCERS '91., 1991 International Conference on
Conference_Location :
San Francisco, CA, USA
Print_ISBN :
0-87942-585-7
DOI :
10.1109/SENSOR.1991.149075
