Novel Micro/Nanofluidics Fabricated by Imprint Molding of Inorganic Polymers

We have successfully fabricated the polysilazane glass derived microfluidics with high optical transparency, biocompatibility thermal stability and chemical inertness via simple fabrication process. And also a hydrophilic nanofluidic system was fabricated with newly synthesized organic-inorganic material with excellent patternability. The preliminary study for photochemical reactions with the microfluidics, the separation of biomolecules with nanofluidics, it was claimed the obvious niche between conventional devices using glass and PDMS materials, thus it holds tremendous potential in the field of micro reaction technology as well as biosensor and bioreactors