Title :
An application of PZT thick films on LTCC substrates: A case study of a resonant pressure sensor
Author :
Zarnik, M.S. ; Belavic, D. ; Macek, S. ; Kosec, M.
Author_Institution :
HIPOT-RR, ¿entjernej, Slovenia, c/o Jo¿ef Stefan Institute, Ljubljana, Slovenia
Abstract :
Lead-zirconate-titanate (PZT) thick films on pre-fired low-temperature co-fired ceramic (LTCC) substrates were characterised and tested for the application of a piezoelectric resonant pressure sensor. The experimentally obtained material parameters for the thick-film (TF) PZT were used in a finite-element (FE) model of the sensor, which was realised in a 3D LTCC structure with a flexible diaphragm. The simulations revealed the trends and helped to optimise the design.
Keywords :
Ceramics; Composite materials; Iron; Piezoelectric materials; Resonance; Sensor phenomena and characterization; Substrates; Testing; Thick film sensors; Thick films;
Conference_Titel :
Applications of Ferroelectrics, 2008. ISAF 2008. 17th IEEE International Symposium on the
Conference_Location :
Santa Re, NM, USA
Print_ISBN :
978-1-4244-2744-4
Electronic_ISBN :
1099-4734
DOI :
10.1109/ISAF.2008.4693827
