DocumentCode
1606767
Title
PZT thick films for MEMS
Author
Gebhardt, S. ; Partsch, U. ; Schönecker, A.
Author_Institution
Department of Intelligent Materials and Systems, Fraunhofer Institute for Ceramic Technologies and Systems, Winterbergstr. 28, 0177 Dresden, Germany
Volume
3
fYear
2008
Firstpage
1
Lastpage
2
Abstract
Al2O3, silicon and low temperature cofired ceramics (LTCC) are key functional materials, forming the substrate basis in microsystems technologies. They allow for three dimensional component integration, high robustness and excellent reliability. The combination of these substrate materials with piezoelectric films offer advanced sensor, actuator and ultrasonic transducer solutions which open up new fields of applications. We developed a PZT thick film paste with excellent dielectric and electromechanical properties. In combination with special electrode and barrier layers a technology was achieved allowing for the development of custom products.
Keywords
Aluminum oxide; Ceramics; Dielectric materials; Dielectric substrates; Micromechanical devices; Piezoelectric materials; Robustness; Silicon; Temperature sensors; Thick films;
fLanguage
English
Publisher
ieee
Conference_Titel
Applications of Ferroelectrics, 2008. ISAF 2008. 17th IEEE International Symposium on the
Conference_Location
Santa Re, NM, USA
ISSN
1099-4734
Print_ISBN
978-1-4244-2744-4
Electronic_ISBN
1099-4734
Type
conf
DOI
10.1109/ISAF.2008.4693830
Filename
4693830
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