DocumentCode
1607593
Title
Efficiency Enhancing for Mask Based Laser Structuring
Author
Jasper, K. ; Berger, P. ; Hugel, H.
Author_Institution
Institut fur-Strahlwerkzeuge, University of Stuttgart
fYear
1998
Firstpage
311
Lastpage
311
Keywords
Artificial intelligence; Coatings; Ion beams; Laser beams; Optical devices; Optical films; Particle beam optics; Probes; Pulsed laser deposition; Sputtering;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics Europe, 1998. 1998 CLEO/Europe. Conference on
Conference_Location
Glasgow, Scotland
Print_ISBN
0-7803-4233X
Type
conf
DOI
10.1109/CLEOE.1998.719465
Filename
719465
Link To Document