High-frequency (>100MHz) PZT thick film transducers and Kerfless arrays

Author

Wu, D.W. ; Zhou, Q.F. ; Zhu, B.P. ; Shung, K.K. ; Djuth, F.T. ; Liu, C.G.

Author_Institution

NIH Transducer Resource center and Department of Biomedical Engineering, University of Southern California, Los Angeles, 90089-1451 USA

Volume

3

fYear

2008

Firstpage

1

Lastpage

2

Abstract

This paper presents the latest development of high-frequency (>100MHz) PZT film ultrasonic transducers and kerfless arrays. PZT thick films of 12 ??m in thickness were fabricated with a spin-coating method. The films were found to have a remanent polarization of 33 ??C/cm2 and a coercive field Ec of 70 kV/cm. High-frequency (120MHz) single element transducers and a kerfless array were successfully fabricated with these films. The transducer and array have ??6dB bandwidth of 40% without matching, and 60% with a layer of parylene as the matching layer. The single element transducer was found to have an axial resolution of 20??m and lateral resolution of 100??m. Ultrasonic images of a porcine eye were also successfully acquired with the single element transducer. Kerfless array imaging is onging.

Keywords

Biomedical transducers; Electrodes; Fabrication; Ferroelectric films; Ferroelectric materials; Frequency; Insulation; Thick films; Ultrasonic imaging; Ultrasonic transducers;

fLanguage

English

Publisher

ieee

Conference_Titel

Applications of Ferroelectrics, 2008. ISAF 2008. 17th IEEE International Symposium on the

Conference_Location

Santa Re, NM, USA

ISSN

1099-4734

Print_ISBN

978-1-4244-2744-4

Electronic_ISBN

1099-4734

Type

conf

DOI

10.1109/ISAF.2008.4693881

Filename

4693881