DocumentCode :
1608785
Title :
Characterization of Laser Plasma Plume for Deposition of CN/sub x/ Films
Author :
Lancok, J. ; Jelinek, J. ; Bulir, J. ; Grivas, Christos
Author_Institution :
Czech Academy of Sciences
fYear :
1998
Firstpage :
313
Lastpage :
313
Keywords :
Plasmas;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Lasers and Electro-Optics Europe, 1998. 1998 CLEO/Europe. Conference on
Conference_Location :
Glasgow, Scotland
Print_ISBN :
0-7803-4233X
Type :
conf
DOI :
10.1109/CLEOE.1998.719470
Filename :
719470
Link To Document :
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