Title :
Investigation of sensitive and restoring parameters for nanostructured Al2O3 based humidity sensors
Author :
Shimanovich, D.L.
Author_Institution :
Belarusian State Univ. of Inf. & Radioelectron. Belarus, Minsk, Belarus
Abstract :
The volumetric-surface variant of the capacitive MDM (metal-dielectric-metal) structure of the vertical direction based on high-ordered matrices of free anodic porous alumina membranes for applications in humidity sensing elements was designed. The improved humidity sensitivity, reduced response and recovery time over a wide humidity range were obtained due to preparing of alumina membranes with open-ended and widened pores without the barrier layer. Such technological approach allows to eliminate the effect of the electrolyte anions embedded in pore walls on the adsorption and desorption processes in humidity sensing elements.
Keywords :
adsorption; alumina; capacitive sensors; desorption; electrolytes; humidity sensors; matrix algebra; membranes; nanosensors; nanostructured materials; porosity; Al2O3; adsorption process; capacitive MDM structure; desorption process; electrolyte anions; free anodic porous alumina membrane; high-ordered matrices; humidity sensing elements; humidity sensor; metal-dielectric-metal; open-ended pores; pore walls; recovery time reduction; response time reduction; volumetric surface variant; widened pores; Chemicals; Etching; Films; Humidity; Sensitivity; Sensors; Time factors; anodic porous alumina; humidity sensing element; membrane; recovery time; response time;
Conference_Titel :
Electrical and Electronic Engineering Conference (ElConRusNW), Proceedings of the 2014 IEEE NW Russia Young Researchers in
Conference_Location :
St. Petersburg
Print_ISBN :
978-1-4799-2593-3
DOI :
10.1109/ElConRusNW.2014.6839205
