DocumentCode

1609035

Title

Backside-Laser Annealing of Silicon at Low Temperature

Author

Antonova, L.K. ; Bayazitov, R.M. ; Galyautdinov, M.F. ; Grotzchel, R.

Author_Institution

Kazan Physical-Technical Institute of The Russian Academy of Sciences

fYear

1998

Firstpage

315

Lastpage

315

Keywords

Annealing; Silicon; Temperature;

fLanguage

English

Publisher

ieee

Conference_Titel

Lasers and Electro-Optics Europe, 1998. 1998 CLEO/Europe. Conference on

Conference_Location

Glasgow, Scotland

Print_ISBN

0-7803-4233X

Type

conf

DOI

10.1109/CLEOE.1998.719474

Filename

719474