Title :
Accelerometer based on non-linear micromechanical transformer with frequency output
Author :
Kalyonov, Vladimir ; Korlyakov, Andrey ; Vaigachev, Aleksandr
Author_Institution :
Fac. of Electron., St. Petersburg Electrotech. Univ. “LETI”, St. Petersburg, Russia
Abstract :
Basic principle measurement of frequency-resonance method by nonlinear micromechanical transformer is developed in this article. The condition for increasing sensitivity of nonlinear micromechanical transformer by movement and force is offered. There is an example of accelerometer on principle of nonlinear micromechanical transformer and optimization its parameters is done.
Keywords :
accelerometers; frequency measurement; microsensors; optimisation; transformers; accelerometer; frequency resonance method; nonlinear micromechanical transformer; parameter optimization; resonant frequency measurement; Acceleration; Accelerometers; Frequency measurement; Resonant frequency; Sensors; Suspensions; Transducers; MEMS; frequency-resonance method of measurement; micromechanical accelerometer; nonlinear micromechanical transformer;
Conference_Titel :
Electrical and Electronic Engineering Conference (ElConRusNW), Proceedings of the 2014 IEEE NW Russia Young Researchers in
Conference_Location :
St. Petersburg
Print_ISBN :
978-1-4799-2593-3
DOI :
10.1109/ElConRusNW.2014.6839209